Industrial Applications of Ellipsometry
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Date
2013-06
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Addis Ababa University
Abstract
Ellipsometry is generally a non-invasive, non-destructive measurement technique
to obtain optical properties of a sample material by studying the state of polarization
of the re
ected light waves. Light polarization is a rich source of information and its
measurement is important in many applications. In ellipsometry, which is a branch of
optical polarimetry, fast measurement of the state of polarization of re
ected light is making
possible contineous, in-situ, and non-destructive monitoring and control of industrial
processes. Basic concepts of these fast polarimetric sensors, along with thier applications
in di erent industries, are brie
y discussed
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Keywords
Applications of Ellipsometry