Optimization of Ellipsometric Components for user Friendly Determination of Optical Parameters of thin Films

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Date

2007-09

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Addis Ababa University

Abstract

In this work the optical constants and thickness of organic thin films is determined using ellipsometry technique. Because it is non-destructive and sensitive to several material characteristics, such as Layer thickness, optical constants (refractive index and extinction coefficient), Surface roughness Composition, Optical anisotropy. Choosing one of the number of ellipsometry setting rotating analyzer ellipsometry (RAE) techniques and by optimizing the components of the ellipsometery for automated way attempt was made to determine optical constants(complex and real refractive index),absorption and thickness of APFO-Green6 organic thin film which coated with a speed of 600rpm on glass substrate, for wavelengths 532nm, 632.8nm, 660nm, 808nm, 1064nm for five angle of incident to each wavelength

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Optimization of Ellipsometric Components

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