Optimization of Ellipsometric Components for user Friendly Determination of Optical Parameters of thin Films
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Date
2007-09
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Addis Ababa University
Abstract
In this work the optical constants and thickness of organic thin films is determined
using ellipsometry technique. Because it is non-destructive and sensitive to
several material characteristics, such as Layer thickness, optical constants (refractive
index and extinction coefficient), Surface roughness Composition, Optical anisotropy.
Choosing one of the number of ellipsometry setting rotating analyzer ellipsometry
(RAE) techniques and by optimizing the components of the ellipsometery for automated
way attempt was made to determine optical constants(complex and real
refractive index),absorption and thickness of APFO-Green6 organic thin film which
coated with a speed of 600rpm on glass substrate, for wavelengths 532nm, 632.8nm,
660nm, 808nm, 1064nm for five angle of incident to each wavelength
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Keywords
Optimization of Ellipsometric Components